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M.Sc. Mikrosystemtechnik (de)

Microsystems, MEMS, or micromachines: these are just some names for an exciting and dynamic engineering discipline which combines expertise from areas as diverse as electrical engineering, biology, manufacturing technology, and chemistry. As a result this engineering field allows engineers to conceive highly miniaturised, multi-functional systems used for medical and diagnostic purposes, in communication and information systems as well as in the automotive industry. 


  • Bachelor's degree in Microsystems Engineering or in a closely related study field, undergraduate knowledge in mathematics, chemistry, physics, electronics, electrical and mechanical engineering, microsystems engineering, and cleanroom experience
  • English language proficiency (IELTS 6.0 or TOEFL 87)
  • German language proficiency (C1)

Facts and Figures

Scope: 120 ECTS credit points
Standard program duration:  4 semesters = 2 years
Language of instruction: German and English


winter semester
(October) or summer semester (April)

Fees and Cost

German and EU nationals
  • 78 € to support the services offered by Studierendenwerk (SWFR)
  • 70 € administrative fee
  •   7 € to support the student council

Altogether 155 € per semester to be paid to the university.

Non-EU nationals
  • 1500 € tuition fees
  •     78 € to support the services offered by Studierendenwerk (SWFR)
  •     70 € administrative fee
  •       7 € to support the student council

Altogether 1655 € per semester to be paid to the university.

The living cost in Freiburg amounts to approximately 700 - 800 € per month.



First step: Enter your data into our online application portal
Second step: Print the application you created in the online portal and send it by post (the address is specified on the application form you created in the online application portal) along with the following documents:

  • A certified copy of your undergraduate diploma (if available)
  • A certified copy of your  transcript of marks (including your current or final average grade)
  • A certified copy of a proof of German proficiency (C1)
  • A certified copy of a proof of English proficiency (B2) (e.g. TOEFLor IELTS)
  • Curriculum vitae or résumé (to be written in German)
  • Personal Statement of intent (to be written in German)

Please note: All documents must be submitted as hard copies. Soft copies or incomplete applications will not be considered. Certificates issued in a language other than German or English must be accompanied with a translation by an authorized translator. Application documents will not be returned to you (regardless of whether you are admitted or not).



The admission committee will verify whether you fulfill the special prerequisites outlined in the admission regulations. For further information please contact the program coordinator (see contact persons).

Please note: University admission requirements may be subject to change prior to the start of the application period.

Application deadlines:

31 May for the winter semester
15 January for the summer semester

Please note: These deadlines do not refer to the date by which your online application must be completed, but to the last possible date by which all of your application documents must be received by the university.


FAQs pertaining to the application and admission procedure

Faculty affiliation: Faculty of Engineering


During the first semester, seven mandatory courses deepen the fundamental theoretical framework for a future career in Microsystems. These courses are designed to complete the students' basic knowledge about Microsystems Engineering acquired during undergraduate studies. More specifically, these courses are:

  • Assembly and Packaging
  • Microelectronics
  • Micromechanics
  • Micro-optics
  • Sensors/Actuators
  • Microfluidics
  • MST Design Laboratory I

In the second, third and fourth semester, MST students can focus in three of the following eight concentration areas (elective courses), thus allowing each student to realize individual interests and to obtain an in-depth look at three sub-disciplines of this very broad, interdisciplinary field:

  • Circuits and Systems
  • Design and Simulation
  • Life Sciences: Biomedical Engineering
  • Life Sciences: Lab-on-a-chip
  • Materials
  • Photonics
  • Process Engineering
  • Sensors and Actuators

Job Prospectives

Graduates of the Master's program in Mikrosystemtechnik can either apply for a PhD position or work as an engineer in a company. Potential employers are companies working in fields including electronics or mechanical, automotive, or biomedical engineering.

Syllabus and Examination Regulations

Contact Persons

Do you have any questions concerning the application and admission procedure? Please contact the program coordinator:


Georges-Köhler-Allee 101
Room 101 02 013a
Phone: +49 761 203 8340

Ursula Epe 

For questions pertaining to the curriculum, please contact the study advisors:


Georges-Köhler-Allee 103
Phone: +49 761 203 97947 or
            +49 761 203-7164

Dr. Andreas Greiner
Dr. Oswald Prucker


"Hands-on program, modern technology, good and motivated instructors."
"Diversified curriculum giving insight in various fields and disciplines"
"Big variety of elective courses and concentration areas."
"Broad education, good student services, good equipment"
"Many lab courses"

Main characteristics of the program

Practical Cleanroom Experience

Cleanrooms are crucial for the design and production of microsystems, since the presence of even one tiny dust particle can destroy such a system. Cleanrooms are expensive to maintain and working in such a lab requires special skills. All of our Master students will participate in a cleanroom lab and may use the cleanroom during their Master thesis project (if necessary), thus acquiring important skills needed for working in as a researcher or in a company.

A Mentor for each Student

Each professor is in charge of a number of students whom s/he mentors. These mentors help you to organize your studies and are ready to answer your questions about studying abroad, finding a job and more. 

MST Design Lab

As part of the mandatory courses, the Microsystems Design Laboratory is a two-semester course in which small teams of students undertake a comprehensive, hands-on design project. Requiring students to address all aspects of the generation of a microsystem, from conceptualization, to project planning to fabrication and testing, this course provides an essential glimpse into the workings of engineering projects.

Smart, Micro, Green

Green - Freiburg is renowned worldwide as a Green City. Since 2015, the Faculty of Engineering has had its own Department of Sustainable Systems Engineering. The researchers of this department build systems that hardly need any energy, have a long life cycle, and adapt themselves easily to difficult environmental conditions.

Smart - stands for autonomously acting robots, computers that learn to interpret pictures, or algorithms that become more and more intelligent and fast. In summary: At the Faculty of Engineering, smart stands for computer science.

Micro - Our researchers design tiny technical systems that handle complex tasks needed in medicine or in production plants. Nowadays each of us uses such systems on a daily basis - often without even noticing. Developing microsystems is an exciting and challenging job - not only for students but also for companies. Our study programs are the best preparation for a career in this field.

Studying engineering in Freiburg means that you will benefit from these three research areas, no matter which study field you choose. Smart, micro and green ideas will increasingly be needed. We offer to teach you the skills needed for developing these kinds of systems.



Further information

Website of the Department of Microsystems Engineering

Orientation manual for new students

PDF flyer of the study program