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M.Sc. Microsystems Engineering (en)

Microsystems, MEMS, or micromachines: these are just some names for an exciting and dynamic engineering discipline which combines expertise from areas as diverse as electrical engineering, biology, manufacturing technology, and chemistry. As a result this engineering field allows engineers to conceive highly miniaturized, multi-functional systems used for medical and diagnostic purposes, in communication and information systems as well as in the automotive industry.

The English taught Master's degree program in Microsystems Engineering has been designed for German and international graduates holding a Bachelor's degree in electronics, mechatronics, (bio-)medical engineering or any other related engineering discipline.


  • Bachelor's degree in Mechatronics, Electrical, Electronics, or Mechanical engineering, or in a closely related study field, undergraduate knowledge in mathematics, chemistry, physics, electronics, electrical and mechanical engineering and materials
  • English language proficiency (IELTS 6.5 or TOEFL 92)

Facts and Figures

Scope: 120 ECTS credit points
Standard program duration:  4 semesters = 2 years
Language of instruction: English


winter semester

Fees and cost

German and EU nationals
  • 78 € to support the services offered by Studierendenwerk (SWFR)
  • 70 € administrative fee
  •   7 € to support the student council

Altogether 155 € per semester to be paid to the university.

Non-EU nationals
  • 1500 € tuition fees
  •     78 € to support the services offered by Studierendenwerk (SWFR)
  •     70 € administrative fee
  •       7 € to support the student council

Altogether 1655 € per semester to be paid to the university.

The living cost in Freiburg amounts to approximately 700 - 800 € per month.



First step: Enter your data into our online application portal
Second step: Print the application you created in the online portal and send it by post (the address is specified on the application form you have created in the online application portal) along with the following documents:

  • A certified copy of your undergraduate diploma (if available)
  • A certified copy of your  transcript of marks (including your current or final average grade)
  • Proof of English proficiency*
  • General GRE test (strongly recommended; all sections are important!)
  • At least one recommendation letter issued by a university professor, using the following form
  • Personal Statement of intent (explaining why you want to study the MSc. in Microsystems Engineering at the University of Freiburg)
  • Curriculum vitae or résumé
  • APS certificate (only for applicants who have studied in China, Mongolia or Vietnam)

Additional documents that can be useful to submit:

  • certificate about your rank in class rank
  • certificate about the average grade of your class
  • University entrance exam result from your home country (if applicable)
  • GATE result (India)

* English proficiency and GRE score reporting:
The following English language certificates are accepted: TOEFL, IELTS, Cambridge Certificate of Proficiency in English, or Cambridge Certificate of Advanced English. Only native speakers are exempted from submitting one of these English language certificates. A confirmation that the medium of instruction at your university was English is not sufficient. IELTS and TOEFL scores should be sent by the test center to the University of Freiburg (institutional code 7125 for ETS; the address for IELTS is the same as for your application). Alternatively, you may send a certified hard copy. The same procedure is required for the GRE score.

Please note: All documents must be submitted as hard copies. Soft copies or incomplete applications will not be considered. Certificates issued in a language other than German or English must be accompanied with a translation by an authorized translator. Application documents will not be returned to you (regardless of whether you are admitted or not).



The admission committee will verify whether you fulfill the special prerequisites outlined in the admission regulations. For further information please contact the program coordinator (see contact persons).

Please note: University admission requirements may be subject to change prior to the start of the application period.

Application deadlines:

1 May (= recommended deadline for non-EU nationals)
1 June (= final deadline for all applicants)

Please note: These deadlines do not refer to the date by which your online application must be completed, but to the last possible date by which all of your application documents must be received by us.


FAQs pertaining to the application and admission procedure

Faculty affiliation: Faculty of Engineering




During the first year, 12 mandatory courses provide the fundamental theoretical framework for a future career in microsystems and equip students with a broad knowledge base in the most important aspects of the field. These courses are:

First semester
  • Microelectronics
  • Micromechanics
  • Micro-optics
  • Sensors
  • Probability and Statistics
  • Microsystems Technologies and Processes
  • Microsystems Design Laboratory I
Second semester
  • Assembly and Packaging Technology
  • Microfluidics
  • Biomedical Microsystems
  • Dynamics of MEMS
  • Micro-actuators
  • Signal Processing
  • Microsystems Design Laboratory II

In the second, third and fourth semester, MSE students can focus in two of the following eight concentration areas (elective courses), thus allowing each student to realize his/her individual interests and obtain an in-depth look at three sub-disciplines of this very broad, interdisciplinary field:

  • Circuits and Systems
  • Design and Simulation
  • Life Sciences: Biomedical Engineering
  • Life Sciences: Lab-on-a-chip
  • Materials
  • Photonics
  • Process Engineering
  • Sensors and Actuators

Essential for the successful completion of the Master’s degree is the submission of a Master’s thesis, which is based on a project performed during the third and fourth semesters of the program. During this time, each student works as a member of one of the 18 research groups of the department, with full access to laboratory and cleanroom infrastructure.

Job Prospectives

Graduates of the Master's program in Microsystems Engineering can either apply for a PhD position or work as an engineer in a company. Potential employers are for example companies working in fields including electronics as well as mechanical, automotive, or biomedical engineering.

Syllabus and Examination Regulations

Contact Persons

Do you have any questions concerning the application and admission procedure? Please contact the program coordinator:


Georges-Köhler-Allee 101
Room 101 02 013a
Phone: +49 761 203 8340

Ms. Ursula Epe 

For questions pertaining to the curriculum, please contact the study advisors:


Georges-Köhler-Allee 103
Phone: +49 761 203 97947 or
            +49 761 203-7164

Dr. Andreas Greiner
Dr. Oswald Prucker


"Hands-on program, modern technology, good and motivated instructors."
"Diversified curriculum giving insight in various fields and disciplines"
"Big variety of elective courses and concentration areas."
"Broad education, good student services, good equipment"
"Many lab courses"

Main Characteristics of the Program

Practical Cleanroom Experience

Cleanrooms are crucial for the design and production of microsystems, since the presence of even one tiny dust particle can destroy such a system. Cleanrooms are expensive to maintain and working in such a lab requires special skills. All of our Master students will participate in a cleanroom lab and may use the cleanroom during their Master thesis project (if necessary), thereby also acquiring important skills needed for working in a researcher or in a company.

A Mentor for each Student

Each professor is in charge of a number of students whom s/he mentors. These mentors help you to organize your studies and are ready to answer your questions about studying abroad, finding a job, and more. 

MST Design Lab

As part of the mandatory courses, the Microsystems Design Laboratory is a two-semester course in which small teams of students undertake a comprehensive, hands-on design project. Requiring students to address all aspects of the generation of a microsystem, from conceptualization to project planning to fabrication and testing, this course provides an essential glimpse into the workings of engineering projects.

Smart, Micro, Green

Green - Freiburg is renowned worldwide as a Green City. Since 2015, the Faculty of Engineering has had its own Department of Sustainable Systems Engineering. The researchers of this department build systems that hardly need any energy, have a long life cycle, and adapt themselves easily to difficult environmental conditions.

Smart - stands for autonomously acting robots, computers that learn to interpret pictures, or algorithms that become more and more intelligent and fast. In summary: At the Faculty of Engineering, smart stands for computer science.

Micro - Our researchers design tiny technical systems that handle complex tasks needed in medicine or in production plants. Nowadays each of us uses such systems on a daily basis - often without even noticing. Developing microsystems is an exciting and challenging job - not only for students but also for companies. Our study programs are the best preparation for a career in this field.

Studying engineering in Freiburg means that you will benefit from these three research areas, no matter which study field you choose. Smart, micro and green ideas will increasingly be needed. We offer to teach you the skills needed for developing these kinds of systems.



Further Information

Website of the Department of Microsystems Engineering

Orientation manual for new students

PDF flyer of the study program